A Review: MICROMIRROR

Note: Toward multiple addressable optical trapping.

We describe a setup for addressable optical trapping in which a laser source is focused on a digital micromirror device and generates an optical trap in a microfluidic cell. In this paper, we report a proof-of-principle single beam/single micromirror/single three-dimensional trap arrangement that should serve as the basis for a multiple-trap instrument.

Fabrication of a Micromirror with Sidewall Electrodes

We designed and fabricated a micromirror with sidewall electrodes in the Cornell NanoScale Science & Technology Facility (CNF) for endoscopic application. The micromirror can perform 2-dimensional scanning. The static and dynamic performances of the micromirror are improved over that of a micromirror without sidewall electrodes. In addition, undesired spring-softening effect that is commonly fo...

Digital micromirror device as a diffractive reconfigurable optical switch for telecommunication

Micromirror arrays to assess luminescent nano-objects.

We propose an array of submicrometer mirrors to assess luminescent nano-objects. Micromirror arrays (MMAs) are fabricated on Si (001) wafers via selectively doping Ga using the focused ion beam technique to form p-type etch stop regions, subsequent anisotropic chemical etching, and Al deposition. MMAs provide two benefits: reflection of luminescence from nano-objects within MMAs toward the Si (...

Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique

In this study we used the commercial 0.35 μm CMOS (complementary metal oxide semiconductor) process and simple maskless post-processing to fabricate an array of micromirrors exhibiting high natural frequency. The micromirrors were manufactured from aluminum; the sacrificial layer was silicon dioxide. Because we fabricated the micromirror arrays using the standard CMOS process, they have the pot...

A 32 by 32 Electroplated Metallic Micromirror Array

−This paper presents the design, fabrication and characterization of a 32 by 32 electroplated micromirror array on a glass, a low cost substrate. Approaches taken in this work for the fabrication of micromachined mirror arrays include a line addressing scheme, a seamless array design for high fill factor, planarization techniques of polymeric interlayers, a high yield methodology for the remova...